Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 15-microm wavelength.

Bruno, F

Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 15-microm wavelength. [electronic resource] - Applied optics Nov 1991 - 4560-4 p. digital

Publication Type: Journal Article

1559-128X

10.1364/AO.30.004560 doi