Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 15-microm wavelength.
Bruno, F
Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 15-microm wavelength. [electronic resource] - Applied optics Nov 1991 - 4560-4 p. digital
Publication Type: Journal Article
1559-128X
10.1364/AO.30.004560 doi
Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 15-microm wavelength. [electronic resource] - Applied optics Nov 1991 - 4560-4 p. digital
Publication Type: Journal Article
1559-128X
10.1364/AO.30.004560 doi