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[Thickness measurement of ultrathin SiO2 layer on Si by using XPS standard curve].

Zhao, Zhi-Juan

[Thickness measurement of ultrathin SiO2 layer on Si by using XPS standard curve]. [electronic resource] - Guang pu xue yu guang pu fen xi = Guang pu Jun 2010 - 1670-3 p. digital

Publication Type: English Abstract; Journal Article

ISSN: 1000-0593

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