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Possibilities for projection x-ray lithography using holographic optical elements.

Howells, M R

Possibilities for projection x-ray lithography using holographic optical elements. [electronic resource] - Applied optics May 1991 - 1580-2 p. digital

Publication Type: Journal Article

ISSN: 1559-128X

Standard No.: 10.1364/AO.30.001580 doi

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