High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation.

Poodt, Paul

High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation. [electronic resource] - Advanced materials (Deerfield Beach, Fla.) Aug 2010 - 3564-7 p. digital

Publication Type: Journal Article

1521-4095

10.1002/adma.201000766 doi


Aluminum Oxide--chemistry
Electric Power Supplies
Silicon--chemistry
Solar Energy
Surface Properties