Photolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays.

Li, Xiaoru

Photolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays. [electronic resource] - Nanoscale research letters Dec 2008 - 521-3 p. digital

Publication Type: Journal Article

1931-7573

10.1007/s11671-008-9190-9 doi