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Photolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays.

Li, Xiaoru

Photolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays. [electronic resource] - Nanoscale research letters Dec 2008 - 521-3 p. digital

Publication Type: Journal Article

ISSN: 1931-7573

Standard No.: 10.1007/s11671-008-9190-9 doi

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