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Influence of the atmosphere on the growth by CVD of silicon based nanostructures.

López-Camacho, E

Influence of the atmosphere on the growth by CVD of silicon based nanostructures. [electronic resource] - Journal of nanoscience and nanotechnology Jul 2009 - 4187-93 p. digital

Publication Type: Journal Article

ISSN: 1533-4880

Standard No.: 10.1166/jnn.2009.m29 doi

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