Normal view MARC view ISBD view

Precise alignment through thick wafers using an optical copying techniquev.

Jahns, J

Precise alignment through thick wafers using an optical copying techniquev. [electronic resource] - Optics letters Mar 1992 - 390-2 p. digital

Publication Type: Journal Article

ISSN: 0146-9592

Standard No.: 10.1364/ol.17.000390 doi

Print
Cite
Add to your cart (remove)
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)