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Determination of the absolute thickness of ultrathin Al2O3 overlayers on Si (100) substrate.

Kim, Kyung Joong

Determination of the absolute thickness of ultrathin Al2O3 overlayers on Si (100) substrate. [electronic resource] - Analytical chemistry Oct 2009 - 8519-22 p. digital

Publication Type: Journal Article

ISSN: 1520-6882

Standard No.: 10.1021/ac901463m doi

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