Nanoimprint lithography using vertically aligned carbon nanostructures as stamps.

Saleem, A M

Nanoimprint lithography using vertically aligned carbon nanostructures as stamps. [electronic resource] - Nanotechnology Sep 2009 - 375302 p. digital

Publication Type: Journal Article

1361-6528

10.1088/0957-4484/20/37/375302 doi


Carbon--chemistry
Microscopy, Electron, Scanning
Microscopy, Electron, Transmission
Nanostructures--chemistry
Nanotechnology--methods