Calibration of wafer surface inspection systems using spherical silica nanoparticles.
Germer, Thomas A
Calibration of wafer surface inspection systems using spherical silica nanoparticles. [electronic resource] - Optics express Mar 2008 - 4698-705 p. digital
Publication Type: Journal Article
1094-4087
10.1364/oe.16.004698 doi
Calibration
Lasers
Materials Testing--methods
Nanoparticles--chemistry
Refractometry--methods
Silicon Dioxide--chemistry
Surface Properties
United States
Calibration of wafer surface inspection systems using spherical silica nanoparticles. [electronic resource] - Optics express Mar 2008 - 4698-705 p. digital
Publication Type: Journal Article
1094-4087
10.1364/oe.16.004698 doi
Calibration
Lasers
Materials Testing--methods
Nanoparticles--chemistry
Refractometry--methods
Silicon Dioxide--chemistry
Surface Properties
United States