Calibration of wafer surface inspection systems using spherical silica nanoparticles.

Germer, Thomas A

Calibration of wafer surface inspection systems using spherical silica nanoparticles. [electronic resource] - Optics express Mar 2008 - 4698-705 p. digital

Publication Type: Journal Article

1094-4087

10.1364/oe.16.004698 doi


Calibration
Lasers
Materials Testing--methods
Nanoparticles--chemistry
Refractometry--methods
Silicon Dioxide--chemistry
Surface Properties
United States