Characterization of interface of Al-Ni/a-Si for thin film transistor using high-resolution Rutherford backscattering spectrometry.

Ichihara, Chikara

Characterization of interface of Al-Ni/a-Si for thin film transistor using high-resolution Rutherford backscattering spectrometry. [electronic resource] - Micron (Oxford, England : 1993) Jan 2009 - 66-9 p. digital

Publication Type: Journal Article

0968-4328

10.1016/j.micron.2008.01.004 doi