Characterization of interface of Al-Ni/a-Si for thin film transistor using high-resolution Rutherford backscattering spectrometry.
Ichihara, Chikara
Characterization of interface of Al-Ni/a-Si for thin film transistor using high-resolution Rutherford backscattering spectrometry. [electronic resource] - Micron (Oxford, England : 1993) Jan 2009 - 66-9 p. digital
Publication Type: Journal Article
0968-4328
10.1016/j.micron.2008.01.004 doi
Characterization of interface of Al-Ni/a-Si for thin film transistor using high-resolution Rutherford backscattering spectrometry. [electronic resource] - Micron (Oxford, England : 1993) Jan 2009 - 66-9 p. digital
Publication Type: Journal Article
0968-4328
10.1016/j.micron.2008.01.004 doi