A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range.
Judy, J W
A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range. [electronic resource] - IEEE transactions on ultrasonics, ferroelectrics, and frequency control 1990 - 428-37 p. digital
Publication Type: Journal Article
0885-3010
10.1109/58.105249 doi
A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range. [electronic resource] - IEEE transactions on ultrasonics, ferroelectrics, and frequency control 1990 - 428-37 p. digital
Publication Type: Journal Article
0885-3010
10.1109/58.105249 doi