Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer.

Kawabata, S

Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer. [electronic resource] - Applied optics Apr 1997 - 2178-82 p. digital

Publication Type: Journal Article

1559-128X

10.1364/ao.36.002178 doi