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Micromachined silicon nitride deformable mirrors for focus control.

Himmer, P A

Micromachined silicon nitride deformable mirrors for focus control. [electronic resource] - Optics letters Aug 2001 - 1280-2 p. digital

Publication Type: Journal Article

ISSN: 0146-9592

Standard No.: 10.1364/ol.26.001280 doi

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