Physical vapor deposition method for the high-throughput synthesis of solid-state material libraries.

Guerin, Samuel

Physical vapor deposition method for the high-throughput synthesis of solid-state material libraries. [electronic resource] - Journal of combinatorial chemistry - 66-73 p. digital

Publication Type: Journal Article; Research Support, Non-U.S. Gov't

1520-4766

10.1021/cc050117p doi


Combinatorial Chemistry Techniques--instrumentation
Hot Temperature
Inorganic Chemicals--chemical synthesis
Models, Chemical
Silicon--chemistry
Volatilization