Electrostatic nanolithography in polymers using atomic force microscopy.

Lyuksyutov, Sergei F

Electrostatic nanolithography in polymers using atomic force microscopy. [electronic resource] - Nature materials Jul 2003 - 468-72 p. digital

Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.

1476-1122

10.1038/nmat926 doi


Microscopy, Atomic Force
Nanotechnology
Polymers
Tungsten