Fluorine in silicon: diffusion, trapping, and precipitation.
Pi, X D
Fluorine in silicon: diffusion, trapping, and precipitation. [electronic resource] - Physical review letters Apr 2003 - 155901 p. digital
Publication Type: Journal Article
0031-9007
10.1103/PhysRevLett.90.155901 doi
Fluorine in silicon: diffusion, trapping, and precipitation. [electronic resource] - Physical review letters Apr 2003 - 155901 p. digital
Publication Type: Journal Article
0031-9007
10.1103/PhysRevLett.90.155901 doi