AES and SIMS investigation of diffusion barriers for copper metallization in power-SAW devices.
Baunack, S
AES and SIMS investigation of diffusion barriers for copper metallization in power-SAW devices. [electronic resource] - Analytical and bioanalytical chemistry Apr 2003 - 891-5 p. digital
Publication Type: Journal Article
1618-2642
10.1007/s00216-002-1741-9 doi
AES and SIMS investigation of diffusion barriers for copper metallization in power-SAW devices. [electronic resource] - Analytical and bioanalytical chemistry Apr 2003 - 891-5 p. digital
Publication Type: Journal Article
1618-2642
10.1007/s00216-002-1741-9 doi