Dynamic chemical mapping near a Si/SiO2 interface at elevated temperatures using plasmon-loss images.

Sasaki, K

Dynamic chemical mapping near a Si/SiO2 interface at elevated temperatures using plasmon-loss images. [electronic resource] - Journal of microscopy Jul 2001 - 12-6 p. digital

Publication Type: Journal Article

0022-2720

10.1046/j.1365-2818.2001.00911.x doi