Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications-Towards the CMOS-MEMS Monolithic Approach.

Name: Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications-Towards the CMOS-MEMS Monolithic Approach.
Author: Liu, Haotian

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications-Towards the CMOS-MEMS Monolithic Approach. — المؤلف: Liu, Haotian — Micromachines Oct 2018

المؤلف: Liu, Haotian
النشر: Micromachines Oct 2018