Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition.

Name: Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition.
Author: Seppänen, Heli

Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition. — المؤلف: Seppänen, Heli — Materials (Basel, Switzerland) Jan 2019

المؤلف: Seppänen, Heli
النشر: Materials (Basel, Switzerland) Jan 2019