Suppressing the Initial Growth of Sidewall GaN by Modifying Micron-Sized Patterned Sapphire Substrate with H₃PO₄-Based Etchant.

Suppressing the Initial Growth of Sidewall GaN by Modifying Micron-Sized Patterned Sapphire Substrate with H₃PO₄-Based Etchant. — المؤلف: Hsu, Wen-Yang — Micromachines Nov 2018

المؤلف
Hsu, Wen-Yang
النشر
Micromachines Nov 2018