Vibration Identification of Folded-MEMS Comb Drive Resonators.
Vibration Identification of Folded-MEMS Comb Drive Resonators. — المؤلف: Han, Jianxin — Micromachines Aug 2018
- المؤلف
- Han, Jianxin
- النشر
- Micromachines Aug 2018
Vibration Identification of Folded-MEMS Comb Drive Resonators. — المؤلف: Han, Jianxin — Micromachines Aug 2018