AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications.

Name: AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications.
Author: Miguel, Jose Angel

AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications. — المؤلف: Miguel, Jose Angel — Micromachines Jul 2018

المؤلف: Miguel, Jose Angel
النشر: Micromachines Jul 2018