Acceleration Sensitivity in Bulk-Extensional Mode, Silicon-Based MEMS Oscillators.

Name: Acceleration Sensitivity in Bulk-Extensional Mode, Silicon-Based MEMS Oscillators.
Author: Khazaeili, Beheshte

Acceleration Sensitivity in Bulk-Extensional Mode, Silicon-Based MEMS Oscillators. — المؤلف: Khazaeili, Beheshte — Micromachines May 2018