Fabrication Technology and Characteristics Research of the Acceleration Sensor Based on Li-Doped ZnO Piezoelectric Thin Films.

Name: Fabrication Technology and Characteristics Research of the Acceleration Sensor Based on Li-Doped ZnO Piezoelectric Thin Films.
Author: Li, Sen

Fabrication Technology and Characteristics Research of the Acceleration Sensor Based on Li-Doped ZnO Piezoelectric Thin Films. — المؤلف: Li, Sen — Micromachines Apr 2018

المؤلف: Li, Sen
النشر: Micromachines Apr 2018