Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing.

Name: Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing.
Author: Yu, Mingxing

Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing. — المؤلف: Yu, Mingxing — Micromachines Apr 2018

المؤلف: Yu, Mingxing
النشر: Micromachines Apr 2018