Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness.

Name: Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness.
Author: Dong, Xianshan

Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness. — المؤلف: Dong, Xianshan — Micromachines Mar 2018

المؤلف: Dong, Xianshan
النشر: Micromachines Mar 2018