Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity.

Name: Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity.
Author: Eltagoury, Yomna M

Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity. — المؤلف: Eltagoury, Yomna M — Micromachines Oct 2016