Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode.

Name: Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode.
Author: Toan, Nguyen Van

Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode. — المؤلف: Toan, Nguyen Van — Micromachines Oct 2017

المؤلف: Toan, Nguyen Van
النشر: Micromachines Oct 2017