Coupling Mechanism Analysis and Fabrication of Triaxial Gyroscopes in Monolithic MIMU.

Name: Coupling Mechanism Analysis and Fabrication of Triaxial Gyroscopes in Monolithic MIMU.
Author: Xia, Dunzhu

Coupling Mechanism Analysis and Fabrication of Triaxial Gyroscopes in Monolithic MIMU. — المؤلف: Xia, Dunzhu — Micromachines Oct 2017