A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines.

Name: A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines.
Author: Liu, Huan

A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines. — المؤلف: Liu, Huan — Micromachines Oct 2017

المؤلف: Liu, Huan
النشر: Micromachines Oct 2017