Stress Distribution Profile Imaging With Spectral Fabry-Perot Interferometry in Thin Layer Substrates for Surface Micromachining.

Name: Stress Distribution Profile Imaging With Spectral Fabry-Perot Interferometry in Thin Layer Substrates for Surface Micromachining.
Author: Inzelberg, Adam

Stress Distribution Profile Imaging With Spectral Fabry-Perot Interferometry in Thin Layer Substrates for Surface Micromachining. — المؤلف: Inzelberg, Adam — Micromachines Sep 2017

المؤلف: Inzelberg, Adam
النشر: Micromachines Sep 2017