Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity.

Name: Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity.
Author: Izawa, Takashi

Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity. — المؤلف: Izawa, Takashi — Micromachines Aug 2017