Effects of Sputtering Parameters on AlN Film Growth on Flexible Hastelloy Tapes by Two-Step Deposition Technique.

Name: Effects of Sputtering Parameters on AlN Film Growth on Flexible Hastelloy Tapes by Two-Step Deposition Technique.
Author: Peng, Bin

Effects of Sputtering Parameters on AlN Film Growth on Flexible Hastelloy Tapes by Two-Step Deposition Technique. — المؤلف: Peng, Bin — Materials (Basel, Switzerland) Aug 2016

المؤلف: Peng, Bin
النشر: Materials (Basel, Switzerland) Aug 2016